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Silicon Surface Modification Using C4F8+O2 Plasma for …
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Silicon Surface Modification Using C4F8+O2 Plasma for …
Website URL:
http://www.ingentaconnect.com/content/asp/jnn/2015/00000015/00000011/art00073;format=ris
Category:
Jaguar
Abstract: The investigation of C 4 F 8 +O 2 feed gas composition on both plasma parameters and plasma treated silicon surface characteristics was carried out.
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